High-Performance Pneumatic Vacuum Disc Valve for Semiconductor Industry
Product Description
Pneumatic vacuum butterfly valves are crucial components in a wide range of industrial processes that demand precise control of vacuum systems and fluid flow. Below is an in-depth introduction to these valves, highlighting their significance and application:
Structure and Design
A pneumatic vacuum butterfly valve is an engineering marvel, comprising a robust valve body, a versatile butterfly disc, a pneumatic actuator, and an efficient sealing mechanism. Constructed from premium materials such as stainless steel or cast iron, the valve body is designed to endure pressure differentials and resist corrosive environments typical of vacuum applications. The centrally mounted butterfly disc elegantly pivots within the valve body, modulating the flow of gas or fluid. The state-of-the-art pneumatic actuator, seamlessly integrates with control systems, facilitating automated operation while driving the disc's rotation. Crafted from resilient elastomeric materials, the sealing mechanism guarantees a leak-proof seal when the valve is closed, preserving the integrity of the vacuum system and preventing leakage.
Working Principle
The operation of a pneumatic vacuum butterfly valve hinges on the rotation of its butterfly disc. Upon receiving a control signal, the pneumatic actuator employs compressed air to generate a mechanical force, which is transmitted to the disc, initiating its rotation. In its fully open position, the disc aligns parallel to the flow, allowing for unrestricted flow of gas or fluid through the valve. As the disc pivots, the flow area diminishes incrementally, enabling meticulous regulation of the flow rate. When the disc aligns perpendicularly at the fully closed position, the valve achieves a secure seal, effectively isolating sections of the vacuum system.
Pneumatic vacuum butterfly valves find extensive applications across various industries, demonstrating their versatility and indispensability:
- Semiconductor Manufacturing: In the high-precision realm of semiconductor production, these valves masterfully govern gas flow within vacuum chambers during pivotal processes like chemical vapor deposition (CVD), etching, and physical vapor deposition (PVD). Their precise flow control is pivotal to ensuring the quality and uniformity of semiconductor products.
- Vacuum Furnaces: In the realms of heat treatment and metallurgy, pneumatic vacuum butterfly valves regulate vacuum levels and gas flows, including inert or reducing gases, during critical heating, cooling, and annealing phases, enhancing process efficiency and product quality.
- Medical and Pharmaceutical Industries: Essential in medical and pharmaceutical sectors, these valves play a key role in vacuum systems, regulating equipment such as vacuum suction devices and facilitating pharmaceutical operations like drying, distillation, and filtration, where vacuum conditions are paramount.
- Food Packaging: Within the food industry, these valves are integral to vacuum packaging machines, meticulously controlling the evacuation of air from packaging, thereby extending the shelf-life and preserving the quality of food products.
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Our Advantages
- Rapid Operation: The sophisticated pneumatic actuator ensures swift opening and closing of the valve, an essential feature for scenarios demanding immediate adaptation to fluctuations in the vacuum system. By facilitating rapid response, this functionality upholds the stability and enhances the efficiency of the entire process.
- Good Flow Control: Engineered with precision, the butterfly disc design ensures seamless and precise flow regulation. It accommodates a broad spectrum of flow rates, rendering it exceptionally suitable for a diverse array of applications that demand varied flow specifications.
- Compact Design: Our Pneumatic vacuum butterfly valves are designed to be notably compact compared to other valve types, making them perfectly suited for tight installation spaces. Ideal for use in confined vacuum chambers or intricate piping networks, their compactness does not compromise functionality.
- Low Maintenance: Featuring a minimalistic design with fewer moving components than many valve alternatives, our pneumatic vacuum butterfly valves are engineered for reduced maintenance. This design choice significantly diminishes downtime and cuts maintenance expenses in industrial settings.
- Compatibility with Automation: Seamlessly integrable into automated control networks, these valves empower remote operation, meticulous monitoring, and precise adjustment. This aligns with the goals of boosting overall productivity and ensuring the highest standards of safety throughout the process.
Certifications

Company Profile
Wuxi Xinming Auto-Control Valves Industry Co., Ltd shines brilliantly with its cutting-edge production facilities, a highly skilled R&D team, and impeccable testing apparatus. Our stellar product lineup features the renowned XM series pneumatic actuators, a diverse range of automatic control valves, and an array of sophisticated valve accessories.
Embracing innovation at its core, Wuxi Xinming has infused new technologies, materials, and techniques along with forward-thinking concepts to engineer the XM series pneumatic actuators. This dedication to research, development, and design has culminated in groundbreaking products that lead the industry.
Our products proudly adhere to the most stringent international standards such as ISO5211, DIN3337, VDI/VDE-3845, and NAMUR. Through a commitment to integrating cutting-edge technologies, materials, and innovative design philosophies, we have crafted the XM series pneumatic actuators that meet and exceed these benchmarks. Certified by ISO9001: 2000 Quality Management System and validated by national technical supervision, our products are the epitome of quality. They find widespread application across industries like chemical processing, oil refining, mining, power generation, metallurgy, construction, pharmaceuticals, food production, gas utilities, and scientific research.
Driven by our guiding principles 'Not for the Largest but for the Best, Technology First, Honesty, Credibility', Wuxi Xinming is committed to delivering unparalleled customer service through superior management, top-tier quality, and unmatched efficiency. We forge robust and enduring partnerships across various sectors and eagerly invite you to collaborate with us in crafting a brighter, shared future.
Application
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